Device Design of Nanoscale MOSFETs Considering the Suppression of Short Channel Effects and Characteristics Variations

The device design of future nanoscale MOSFETs is reviewed. Major challenges in the design of the nanometer MOSFETs and the possible solutions are discussed. In this paper, special emphasis is placed on the combination of new transistor structures that suppress the short channel effect and on back-gate voltage control that suppresses the characteristics variations. Two new device architectures, variable-bodyfactor FD SOI MOSFET and multigate MOSFET with low aspect ratio, have been proposed and their advantages are discussed. key words: SOI, body factor, body effect, FinFET, multigate MOSFET